Atomic layer deposition of two-dimensional layered zirconium sulfide

by | Mar 18, 2024 | Science Highlights - GSECARS

Atomic layer deposition of two-dimensional layered zirconium sulfide

Xiangbo Meng, Yuzi Liu, Fumiya Watanabe, Kevin Velasquez Carballo, Jiyu Cai, Zonghai Chen, Hua Zhou, Atomic layer deposition of two-dimensional layered zirconium sulfide, Materials Today Chemistry, Volume 37, 2024, 102013, ISSN 2468-5194